Semiconductor Manufacturing DT Solution

Semiconductor & FPD Automation Solution will be better than today,
by Infogram Inc.

Real-time data
Process control

Our Solution

What kind of work can we do with Infogram?

Equipment Data

A great deal of data is generated in equipment used for flat-panel displays, such as semiconductors and LCDs. Event, status variables, and alarm data need to be associated with Lot Tracking information in order to be collected and used as meaningful data.

Overlay Control

The photolithography process is one of the most critical processes for semiconductor scaling and yield improvement. Infogram provides comprehensive R2R solutions by analyzing overlay parameters from scanning measurement data to calculate optimal control parameters, which are then delivered to the photo scanner equipment.

Equipment Efficiency

Infogram’s solutions unlock higher levels of equipment productivity, availability, and reliability—beyond the limitations of conventional MES-based management. By leveraging wafer-level tracking and measurement data, identifying key factors through Tool to Tool Matching, and enabling pattern analysis that processes over 10 health data points per second.

Our Product

Introducing Infogram’s products.

Cloud Fab™

Virtual Semiconductor Fab

Cloud Fab™ provides a virtual environment to preview all possible issues with the semiconductor Fab. As it is, Lot is created and Run flows according to Product, Flow, Operation (PFO). In this cloud-provided environment, you can develop DT solutions and equipment software and test them.

Hum ™

Equipment Data Collection Solution

Hum™ collects all data generated from the equipment and makes it into data such as production information and measurement information that can be used by other systems such as MES, EES, and YMS.

Tuba™

Photo Correction Per Exposure Solution

Tuba™ is an R2R system that provides the photo scanner equipment with the control parameter calculated by the photo process result parameter and the Overlay parameter that measured it.

Rahona™

EPT(Equipment Performance Tracking) Solution

Rahona™ is a semiconductor equipment performance analysis system that meets SEMI E10 (RAM), SEMI E58 (ARAMS), SEMI E79 (OEE), and SEMI E116 (EPT).

LIMS

Laboratory Infomation Management Solution for Semiconductor research fab

LIMS is a solution for the intergrated digital management of all data and workflows generated within a semiconductor R&D Fab. Moving beyond simple data logging, it helps automate and track the entire process-from sample intake to the issuance of the final analytical report(Certificate of Analysis).

Awan™

CD-SEM Image Analysis Solution

Virtual measurements with CD-SEM image analysis allow for rapid measurement of all scanned Wafer.

Cumbus™

Unstructured Data Online Solution

By linking file data in a variety of formats to the automation system online, Columbus™ allows key data that has been thrown away to become critical data available in traditional automation systems at a low cost.

Nubes™

Recipe Management Solution

Prevent process accidents and increase equipment efficiency through recipe management of semiconductor equipment.

Wolke™

PR Liquid Management Solution

Wolke™ manages all life cycles of PR from warehousing/storage/thawing/equipment installation/disposal and supports not only the existing PDA-style event management but also the latest RFID movement/replacement processing. It automatically manages first-in-first-out (FIFO), expiration date, storage period, etc.

developed technology

AI-Based Lot Flow Generation Engine

PFO (Product, Process Flow, Operation) Information

PFO is a term used in semicondutor Fab automation and simulation, representing a core information unit for semiconductor production management. It combines P(Product), F(Process Flow), and O(Operation), and is an essential data structure for generating Lots in a Digital Twin environment to preemptively process issues. This AI-based technology automatically generates PFO information identical to the real world for the development and testing of virtual Fabs and semiconductor automation solutions.

OEE Calcuation Engine

Overall Equipment Efficiency engine for semiconductor equipment

Infogram’s EPT solution, Rahona™, includes an OEE calculation engine. To calculate OEE, Availability, Performance, and Quality must be quantified, and statistical methods such as Q3 Quartile are applied by calculating Standard Time (ST). The OEE calculation engine is a technology developed to accurately derive OEE values using only lot tracking information from semiconductor production.

Under development 2026

Wafer Map based on Unity

Flexible 3D-based wafer map

Unity-based Wafer Map is a high-performance visualization tool that goes beyond simple 2D graphics by leveraging the powerful rendering capabilities of a game engine. It is currently under development with the goal of providing real-time visualization of massive datasets, 3D Digital Twin integration, interactive user experiences, and highly scalable, customizable features.

Pyhton Studio

Web-based Python Integrated Development Environment

Python Studio is an embedded Python integrated development environment (IDE) designed to handle LLM-based Al Agents, generative reporting, and complex logic calculations. By connecting Python Studio to various semiconductor DT solutions, users can develop, test, execute, and modify code, while managing everything from version control to production deployment within a single integrated environment.